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Here, you will find our most recent research results published in peer-reviewed journals and books:

2016

E. Förster, M. Stürmer, U. Wallrabe, J. Korvink, P. Bohnert, R. Brunner

Dual-mode spectral Imaging System employing a Focus variable lens 
2016 Advanced Optical Technologies

Petsch S, Khatri B, Schuhladen S, Köbele L, Rix R, Zentel R, Zappe H
Muscular MEMS - The engineering of liquid crystal elastomer actuators
2016 Smart Mater Struct, Band: 25, Seite: 085010
 
Petsch S, Schuhladen S, Dreesen L, Zappe H
 
S. Schuhladen, K. Banerjee, M. Stürmer, P. Müller, U. Wallrabe, H. Zappe

Variable optofluidic slit aperture
2016 Light: Science and Applications, Nummer: 5, Ergänzungsband: e16005

M. Stürmer, M. C. Wapler, J. Schmitt, F. Völklein, U. Wallrabe


Phase gratings with tunable diffraction efficiency. 2016 Opt Express 2016, Band: 24, Nummer: 21, Seiten: 23765 - 23776

2015


Dunkel, Jens; Wippermann, Frank; Reimann, Andreas; Brückner, Andreas; Bräuer, Andreas

Fabrication of microoptical freeform arrays on wafer level for imaging applications, Optics Express 23 (2015) 25, p. 31915-31925

D. Ernst, B. Bramlage, S. E. Gebhardt & A. J. Schönecker

High performance PZT thick film actuators using in plane polarization; Advances in Applied Ceramics 114(4):237-242 · May 2015 DOI: 10.1179/1743676115Y.0000000010

E. Förster, M. Stürmer, U. Wallrabe, J. Korvink, R. Brunner

Bio-inspired variable imaging system simplified to the essentials: modelling accommodation and gaze movement
2015 Opt Express, Band: 23, Nummer: 2, Seiten: 929 - 942

Gebhardt, Sylvia; Ernst, Dörte; Bramlage, Bernhard; Pabst,
Oliver; Oberdörster, Alexander

Micro-positioning stages for adaptive optics based on piezoelectric thick film actuators. Journal of Ceramic Science and Technology 06 (2015) 04, p. 285-290

Gebhardt, Sylvia; Ernst, Dörthe; Bramlage, Bernhardt

Micro-positioning stages for adaptive optics based on piezoelectric thick film actuators, April 2015 DOI: 10.4071/CICMT-WA14
 

2014

 

Brückner, Andreas; Oberdörster, Allexander; Dunkel, Jens; Reimann, Andreas; Müller, Martin; Wippermann, Frank.

Ultra-thin wafer-level camera with 720p resolution using micro-optics; Novel Optical Systems Design and Optimization XVII San Diego, 17.9.14, California, USA, SPIE Proceedings Vol. 9193 (2014) 91930W-8, ISBN 9781628412208


T. Deutschmann, E. Oesterschulze

Integrated electrochromic aperture diaphragm;  Proc. SPIE 9130, Micro-Optics 2014, 913006 (2014)

T. Deutschmann; E. Oesterschulze

Integrated electrochromic iris device for low power and space-limited applications; J. Opt., 16, 075301 (2014)

Pabst, Oliver; Hölzer, Stefan; Beckert, Erik; Perelaer, Jolke; Schubert, Ulrich S.; Eberhardt, Ramona; Tünnermann, Andreas
Inkjet printed micropump actuator based on piezoelectric polymers: Device performance and morphology studies, Organic Electronics 14 (2014) 12 p. 3423–3429, ISSN 1566-1199
 
 D. Pätz, T. Deutschmann, E. Oesterschulze, St. Sinzinger

Depth of focus analysis of optical systems using tunable aperture stops with a moderate level of absorption; Applied Optics, 53 (28) 6508 (2014)


Daniel Pätz, Tobias Deutschmann, Egbert Oesterschulze, and Stefan Sinzinger
Applied Optics
Depth of focus analysis of optical systems using tunable aperture stops with a moderate level of absorption. Applied Optics Vol. 53, Issue 28, pp. 6508-6512 (2014) •https://doi.org/10.1364/AO.53.006508
 

Müller P, Kopp D, Lloreba A, Zappe H

Optofluidic router based on tunable liquid-liquid mirrors
2014 Lab Chip, Band: 14, Nummer: 4, Seiten: 737 - 743


Petsch S, Rix R, Khatri B, Schuhladen S, Müller P, Zentel R, Zappe H

Smart artificial muscle actuators: Liquid crystal elastomers with integrated temperature feedback
2014 Sensor Actuat A-phys

Petsch S, Rix R, Khatri B, Schuhladen S, Müller P, Zentel R, Zappe H

Liquid crystal elastomers with integrated temperature feedback
2014 Sensors and Acuators, Band: 231, Seiten: 44 - 51


Schuhladen S, Preller F, Rix R, Petsch S, Zentel R, Zappe H

Iris-like tunable aperture employing liquid crystal elastomers
2014 Adv Mater

Schuhladen S, Preller F, Rix R, Petsch S, Zentel R, Zappe H

Iris-like tunable aperture employing liquid crystal elastomers
2014 Adv Mater, Band: 26, Nummer: 42, Seiten: 7247 - 7251

J. Stumpe, O. Sakhno, Y. Gritsai, R. Rosenhauer, Th. Fischer, M. Rutloh, F. Schaal, S. Weidenfeld, M. Jetter, P. Michler, C. Pruss and W. Osten

Active and Passive LC Based Polarization Elements; Mol. Cryst. Liq. Cryst. 594 140 (2014)
 

2013


Frank Bunge, Steffen Leopold, Sebastian Bohm, Martin Hoffmann

Scanning micromirror for large, quasi-static 2D-deflections based on electrostatic driven rotation of a hemisphere; http://dx.doi.org/10.1016/j.sna.2016.02.031

Dunkel, Jens; Brückner, Andreas; Reimann, Andreas; Wippermann, Frank; Bräuer, Andreas

Flachbauende Multiaperturkameras mit Freiformarrays hergestellt in Wafer Level Technologie; Mikrosystemtechnik Kongress 2013 (MST), 14.-16.10.2013, Aachen, Germany,Proceedings Mikrosystemtechnik Kongress (MST) (2013) S. 143-145, ISBN 978-3-8007-3555-6

Nicola Heidrich, Fabian Knöbber, Vladimir Polyakov, Volker Cimalla, Wilfried Pletschen, Ram Ekwal Sah, Lutz Kirste, Steffen Leopold, Stefan Hampl, Oliver Ambachera Vadim Lebedev

Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations; http://dx.doi.org/10.1016/j.sna.2013.02.001

Kimmle, C., S. Wolff, C. Doering and H. Fouckhardt (2013)

Dependence of the fused-silica etch rate on the etch mask opening” Microelectron. Eng. 112, 10-13.

S. Leopold, T. Geiling, C. Fliegner, D. Pätz, S. Sinzinger, J. Müller, and M. Hoffmann (2013)

Multifunctional LTCC Substrates for Thermal Actuation of Tunable Micro-Lenses Made of Aluminum Nitride Membranes. Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT): September 2013, Vol. 2013, No. CICMT, pp. 000124-000130; doi: http://dx.doi.org/10.4071/CICMT-2013-WP14

S Leopold, L Mueller, C Kremin and M Hoffmann

Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma emission spectroscopy; Journal of Micromechanics and Microengineering, Volume 23, Number 7, 2013 IOP Publishing Ltd

Leopold, S., T. Polster, D. Pätz, F. Knöbber, O. Ambacher, S. Sinzinger and M. Hoffmann (2013)

MOEMS tunable microlens made of aluminum nitride membranes. Journal of Micro/ Nanolith. MEMS MOEMS 12 (2), 023012.

Liebetraut, P., S. Petsch, J. Liebeskind and H. Zappe (2013).

Elastomeric Lenses with tunable astigmatism. Light: Science & Applications 2, e98.

Liebetraut P, Waibel P, Cu Nguyen P H, Reith P, Aatz B, Zappe H
Optical properties of liquids for fluidic optics
2013 Applied Optics, Band: 52, Nummer: 14, Seiten: 3203 – 3215
 

H Mehner, S Leopold and M Hoffmann

Variation of the intrinsic stress gradient in thin aluminum nitride films; Journal of Micromechanics and Microengineering, Volume 23, Number 9, 2013 IOP Publishing Ltd
 

Pabst, Oliver; Perelaer, Jolke; Beckert, Erik; Schubert, Ulrich S.; Eberhardt, Ramona; Tünnermann, Andreas

All inkjet-printed piezoelectric polymer actuators: characterization and applications for micropumps in Lab-on-a-Chip systems; Organic Electronics 14 (2013) 12, 3423-3429

Schuhladen S, Petsch S, Liebetraut P, Müller P, Zappe H
A miniaturized tunable imaging system inspired by the human eye
2013 Optics Letters, Band: 38, Nummer: 20, Seiten: 3991 - 3994

 

Williges, C., W. Chen, C. Morhard, J. Spatz and R. Brunner (2013)

Increasing the Order Parameter of Quasi Hexagonal Micellar Nanostructures by Ultrasound Annealing. Langmuir 4, 989–993.

S. Weidenfeld, W.-M. Schulz, C. A. Kessler, M. Reischle, M. Eichfelder, M. Wiesner, M. Jetter, and P. Michler

Influence of the oxide aperture radius on the mode spectra of (Al,Ga)As vertical microcavities with electrically excited InP quantum dots; Appl. Phys. Lett. 102, 011132 (2013)

Zappe, H.

Bridging the market gap. Nature 501, 483–485 (26 September 2013) doi:10.1038/501483a

 

2012

Brunner, R., B. Keil, C. Morhard, D. Lehr, J. Draheim, U. Wallrabe and J. Spatz (2012).

Antireflective “Moth-Eye” Structures on Tunable Optical Silicone Membranes. Applied Optics 51(19), 4370–4376.

Ernst, D., B. Bramlage and S. Gebhardt (2012).

In-Plane Polarized PZT Thick Film Actuators by Screen Printing Technology. In Proceedings ACTUATOR 12, Bremen, Germany, S. 128–131.

Gebhardt, S., D. Ernst, B. Bramlage, M. Flössel and A. Schönecker (2012).

Integrated Piezoelectrics for Smart Microsystems – a Teamwork of Substrate and Piezo. In Advances in Science and Technology, S. 1–10. Trans Tech Publications.


Liebetraut P, Liebeskind J, Waibel P, Zappe H

Elastomeric lenses with tunable astigmatism
2012 Optics Express

Müller, P., R. Feuerstein and H. Zappe (2012).

Integrated optofluidic iris. IEEE Journal of Microelectromechanical Systems 21, 1156–1164.

S. Weidenfeld, H. Niederbracht, M. Eichfelder, M. Jetter, and P. Michler

Transverse mode and polarization characteristics of AlGaInP-based VCSELs with integrated multiple oxide apertures, Photonics Europe 2012: Lasers and Photonic Devices, Brussels, Belgium, (2012); Proc. SPIE 8432, 843205 (2012)

Zappe, H. (2012

Micro-optics: A micro tutorial. In H.-P. Herzig (Hrsg.), Advanced Optical Technologies, Volume 1, S. 117–126.

 

2011

 

Draheim, J., T. Burger, T. Kamberger and U. Wallrabe (2011).

Closed- loop pressure control of an adaptive single chamber membrane lens with integrated actuation. In Proceedings of the International Conference on Optical MEMS & Nanophotonics 2011, Istanbul, Turkey, S. 47–48.

Draheim, J., T. Burger, J. G. Korvink and U. Wallrabe (2011).

Variable aperture stop based on the design of a single chamber silicone membrane lens with integrated actuation. Optics Letters 36(11), 2032– 2034.

Draheim, J., T. Burger, F. Schneider and U. Wallrabe (2011).

Fluidic zoom lens system using two single chamber adaptive lenses with integrated actuation. In Proceedings IEEE Int. Conference on MEMS 2011, S. 692–695.

Draheim, J., T. Burger and U. Wallrabe (2011).

Variable fluidische Blende auf Basis einer adaptiven Linse mit integrierter piezoelektrischer Aktuierung. In Mikrosystemtechnikkongress, S. 114–117.

Kimmle, C., C. Doering, A. Steuer and H. Fouckhardt (2011).

Compact dynamic microfluidic iris array. In Proceedings of SPIE Optics and Photonics - Optical Engineering and Application, Dan Diego, USA, SPIE 8125, S. 8125OZ.

Kimmle, C., U. Schmittat, C. Doering and H. Fouckhardt (2011).

Compact dynamic microfluidic iris for active optics. Microelectronical Engineering 88, 1772–1774.

Kluge, C., N. Galler, H. Ditlbacher and M. Gerken (2011).

Modeling of electrically actuated elastomer structures for electro-optical modulation. Applied Physics A 102(2), 407–413.

Krantz, M. C., P. Metz, F. Glöckler, S. Peters, U. Lemmer and M. Gerken (2011).

Optical Beam Positioning with PDMS Thin Film Resonators for Thermal Drift Compensation in Free Space Optical Interconnects. In Proceecdings of the IEEE Photonics Society Winter Topicals Meeting.

Kusserow, T., R. Zamora, M. Wulf, U. Akcakoca, R. Marklein, B. Witzigmann and H. Hillmer (2011).

Polarisationsselektive InP MOEMS Filter mit Photonischen Kristallen. In DGAO Proceedings, S. B3.

Liebetraut, P., S. Petsch, W. Mönch and H. Zappe (2011).

Tunable solid body elastomer lenses with electromagnetic actuation. Applied Optics 50(19), 3268–3274.

Metz, P., M. Krantz and M.Gerken (2011).

Wavelength and polarization effects in actively tunable thin film resonators for thermal drift compensation. In Proceedings IEEE ICTON, S. Th.A4.3.

Müller, P., A. Kloss, W. Mönch and H. Zappe (2011a).

Bistable optofluidic attenuator with integrated electrowetting actuation and high dynamic range. In Proceedings of the 16th International Conference on Solid State Sensors, Actuators and Microsystems, Bejing. China, S. 1150– 1153.

Müller, P., A. Kloss, W. Mönch and H. Zappe (2011b).

A fully integrated optofluidic attenuator. Journal of Micromechanics and Microengineering 12, 125027–125040.

Müller, P., A. Kloss, H. Zappe and W. Mönch (2011).

Optofluidic shutter driven by electrowetting. In Proceedings of the 1st EOS Conference on Optofluidics, EOSAM, Paris, France.

Strohmeier, D., A.Greiner and J. Korvink (2011).

Zernike-Galerkin method: efficient computational tool for elastically deformable optics. JOSA A 28, 2554–2560.

Strohmeier, D., J. Draheim, M. Domaszewski, A. Greiner, U. Wallrabe and J. Korvink (2011).

Particle swarm optimization on a new para- metric model of a deformable membrane lens. In Proceedings of the International Conference on Optical MEMS & Nanophotonics 2011, Instanbul, Turkey, S. 201–202.

Susanne Weidenfeld, Marcus Eichfelder, Michael Wiesner, Wolfgang-Michael Schulz, Robert Roßbach, Michael Jetter, and Peter Michler

Transverse-Mode Analysis of Red-Emitting Highly Polarized Vertical-Cavity Surface-Emitting Lasers; IEEE Journal of Selected Topics in Quantum Electronics, 17, 724-729 (2011)

Susanne Weidenfeld, Marcus Eichfelder, Hendrik Niederbracht, Michael Wiesner, Robert Roßbach, Michael Jetter and Peter Michler

Polarization characteristics of GaInP QW-VCSEL and integration of multiple oxidation layers; Proceedings of the 14th European Workshop on Metalorganic Vapor-Phase Epitaxy, Wroclaw, Poland, June 2011

M. Wiesner, S. Weidenfeld, M. Eichfelder, F. Schaal, C. Pruss, W. Osten, R. Roßbach, M. Jetter, and P. Michler

AlGaInP-based Vertical-Cavity Surface-Emitting Lasers for Sensoring and Polarization Switching; AIP Conf. Proc. 1399, 971 (2011)

Wulf, T. K. M., R. Zamora and K. K. H. Hillmer (2011).

Processing of Photonic Crystals in InP Membranes by Focused Ion Beam Milling and Plasma Etching. In ICMAT 2011, S. BB7–3.

Zamora, R., M. Benes, T. Kusserow, H. Hillmer, U. Akcakoca and B. Witzigmann (2011).

Optical characterization of photonic crystals as polarizing structures for tunable optical MEMS devices. In International Conference on Optical MEMS and Nanophotonics (OMN), 2011, S. 83 – 84.

 

2010

 Bramlage, B. and S. Gebhardt (2010b).

PZT Thick Film Actuators for Active Micro-Optics. In Proceedings of the 12th International Conference on New Actuators, S. 594–596.

Cimalla, V., C.-C. Röhlig, V. Lebedev, O. Ambacher, K. Tonisch, F. Niebelschütz, K. Brückner and M. Hein (2010).

AlGaN/GaN based heterostructures for MEMS and NEMS applications. Solid State Phenomena 159, 27–38.

Draheim, J., R. Kamberger, T. Burger, F. Schneider and U. Wallrabe (2010).

Optimierung von Piezoelektrischen Pumpaktoren für Adaptive Linsen mit Großer Apertur. GMM-Fachbericht: Technologien und Werkstoffe der Mikrosystem- und Nanotechnik 65, 91–94.

Draheim, J., F. Schneider, T. Burger, R. Kamberger and U. Wallrabe (2010).

Single chamber adaptive membrane lens with integrated actuation. In Proceedings of the International Conference on Optical MEMS & Nanophotonics, S. 15–16.

Gebhardt, S., A. Schönecker and C. Bruchmann (2010).

Integrated Actuators based on PZT Thick Films for Microsystems Applications. In Proceedings of the 12th International Conference on New Actuators, S. 122–125.

Hoheisel, D., C. Leng and H. Gatzen (2010).

Electromagnetic Control of Tunable Liquid Microoptics based on Ferrofluid Driven by Microactuation. In Proceedings Dritter Workshop Optische Technologien, S. 198–200.

Hoheisel, D., C. Leng, L. Rissing and H. Gatzen (2010).

Design, Modeling and Fabrication Sequence of a Ferrofluidic Microactuator. In Proceedings of the 12th International Conference on New Actuators, S. 361–364.

Knöbber, F., O. Bludau, O. Williams, R. Sah, L. Kirste, M. Bäumler, S. Leopold, D. Pätz, C. Nebel, O. Ambacher, V. Cimalla and V. Lebedev (2010).

Diamond/AlN Thin Films for Optical Applications. In AIP Conference Proceedings of EMRS, Volume 1292, S. 205–208.

Kusserow, T., M. Wulf, R. Zamora, B. Vengatesan, B. Witzigmann and H. Hillmer (2010).

Photonic Crystal Polarizer Element on InP/Air Membranes for Optical MEMS Applications. In S. Chua, J. Teng, and A. Danner (Hrsgg.), Compound Semiconductor Photonics, S. 66–68. Pan Stanford.

Müller, P., A. Kloss, H. Zappe and W. Mönch (2010).

Optofluidic apertures and shutters with the potential for an integrated electrowetting actuation. In Proceedings of the Annual Meeting of the European Optical Society. (no page numbers available) 

Müller,P., N.Spengler, W.Mönch and H.Zappe (2010).

Tunable optofluidic micro-iris. In Proceedings of the International Conference on Optical MEMS & Nanophotonics, Sapporo, Japan, S. 13–14.

Müller, P., N. Spengler, H. Zappe and W. Mönch (2010).

An Optofluidic Concept for a Tunable Micro-iris. Journal of Microelectromechanical Systems JMEMS 19(6), 1477–1484.

Pätz, D., S. Leopold, F. Knöbber, S. Sinzinger, M. Hoffmann and O. Ambacher (2010).

Tunable Compound Eye Cameras. In Proceedings SPIE, Volume 7716, S. 77160k.

Reithmeier, E., T. Vymmyk and T. Schultheis (2010).

3D-Measurement Using a Scanning Electron Microscope. Applied Mathematics and Computation 217, 1193–1201.

Sah, R., L. Kirste, M. Bäumler, P. Hiesinger, V. Cimalla, V. Lebedev, F. Knoöbber, O. Bludau, C. Röhlig and H. Baumann (2010).

Investigation of Stress in AlN Thin Films for Piezoelectric MEMS. In NSTI- Nanotech 2010 Techn. Proc., Volume 2, S. 344–347.

Sah, R. E., L. Kirste, M. Bäumler, P. Hiesinger, V. Cimalla, V. Lebedev, H. Baumann and H.-E. Zschau (2010).

Residual stress stability in fiber textured stoichiometric AlN film grown using rf magneton sputtering. J. Vac. Sci. Tech. A 28, 394.

Schneider, F., J. Draheim, T. Burger, J. Maclaren, M.Herbst, M.Zaistev, R. Bammer and U. Wallrabe (2010).

An adaptive objective for optical motion correction in MRI. In Proceedings of the International Conference on Optical MEMS & Nanophotonics, S. 189–190.

Schultheis, T., T. Fahlbusch, L. Spani-Molella and E. Reithmeier (2010).

Electromagnetic control of microoptics: Adaptive systems based on ferrofluidic actuators. In Proceedings Dritter Workshop Optische Technologien, S. 208–211.

Schultheis, T., L. Spani-Molella and E. Reithmeier (2010).

Determination of the optical properties of a magnetically driven liquid lens by ray- tracing. In Proceedings of the EOS Annual Meeting (EOSAM 2010), S. 3592: 1–3.

Vynnyk, T., T. Schultheis, T. Fahlbusch and E. Reithmeier (2010).

3D- measurement with the stereo scanning electron microscope on sub- micrometer structures. JEOS 5, 10038s (1–8).

Wiesner, M., S. Weidenfeld, M. Eichfelder, F. Schaal, C. Pruss, W. Osten, R. Roßbach, M. Jetter and P. Michler (2010).

AlGaInP-based Vertical-Cavity Surface-Emitting Lasers for Sensoring and Polarization Switching. In AIP Conference Proceedings 1399, S. 971–972.

Xiao, W. and S. Hardt (2010a).

An Adaptive Liquid Microlens Driven by a Ferrofluidic Transducer. Journal of Micromechanics and Microengineering JMM 10, 055032 (1–8).

Xiao, W. and S. Hardt (2010b).

The dynamic behavior of an adaptive liquid microlens driven by a ferrofluidic transducer. In Proceedings of the 8th International Conference on Nanochannels, Microchannels, Minichannels, S. 30353.

Zamora, R., T. Kusserow, M. Wulf, K. Kanwar, B. Witzigmann and H. Hillmer (2010).

Structuring of 2D Photonic Crystal on InP Mem- branes as Polarizing Element for Optical MEMS Based Sensor Systems. In IEEE Proceedings Technical Digest INSS, S. 179–182.

2009

Brückner, A., J. Duparré, P. Dannberg, A. Bräuer and C. Hoffmann (2009).

Ultra-compact vision system for automotive applications. In Proceedings 4th EOS Topical Meeting on Advanced Imaging Techniques, S. 166–167.

Brückner, A., J. Duparré, F. Wippermann, P. Dannberg and A. Bräuer (2009).

Microoptical Artificial Compound Eyes. In D. Floreano, J.-C. Zufferey, M. Srinivasan, and C. Ellington (Hrsgg.), Flying Insects and Robots, S. 127–142. Springer.

Cimalla, V., V. Lebedev, C.-C. Röhlig, O. Ambacher, F. Niebelschütz, K. Tonisch, J. Petzoldt, K. Brückner and M. Hein (2009).

Wide band gap based MEMS for harsh environment applications. In Proceedings of the 33rd Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDIC, Malaga, Spain, S. 2–9.

Draheim, J., F. Schneider, R. Kamberger, C. Müller and U. Wallrabe (2009).

Fabrication of a Fluidic Membrane Lens System. Journal of Micromechanics and Microengineering JMM 19, 095013 (1–7).

Eichfelder, M., W.-M. Schulz, M. Reichle, M. Wiesner, R. Roßbach, M. Jetter and P. Michler (2009).

Room-temperature lasing of electrically pumped red-emitting InP/(Al0.20Ga0.80)0.51In0.49P quantum dots embedded in a vertical microcavity. Applied Physics Letters 95, 131107 (1–4).

Kamberger, R., F-Schneider, J. Draheim and U. Wallrabe (2009).

Reliable filling procedure for a fluidic membrane lens. In MicroMechanics Europe, S. D.03 (1–4).

Kriele, A., A. Williams, M. Wolfer, D. Brink, W. Müller-Sebert and C. Nebel (2009).

Tunable optical lenses from diamond thin films. Applied Physics Letters 95, 031905 (1–3).

Kusserow, T., N. Dharmarasu, S. Irmer, H. Hillmer and B. Vengatesan (2009).

Tunable Fabry-Perot-filters based on InP/air-gap mirrors. Photonik International 1, 14–16.

Schneider, F., J. Draheim, R. Kamberger, P. Waibel and U. Wallrabe (2009).

Optical Characterization of Adaptive Fluidic Silicone- membrane Lenses. Optics Express 17(14), 11813–11821.

Schneider, F., J. Draheim, R. Kamberger and U. Wallrabe (2009).

Process and Material Properties of Polydimethylsiloxane (PDMS) for Optical MEMS. Sensors & Actuators A 151, 95–99.

Schneider, F., J. Draheim, C. Müller and U. Wallrabe (2009).

Optimization of an Adaptive PDMS-membrane Lens with an Integrated Actuator. Sensors & Actuators A 154, 316–321.

Schultheis, T., T. Fahlbusch, M. Rahlves, L. Spani-Molella and E. Reithmeier (2009).

Brennweitenvariation fluidischer Mikrooptiken. In Zweiter Workshop Optische Technologien Tagungsband, Produktionstechnisches Zentrum Hannover (PZH), S. 158–160.

Schultheis, T., T. Vynnyk, T. Fahlbusch and E. Reithmeier (2009).

Enhanced Stereo SEM Measurement of Sub-micrometer Structures. In Proceedings of the EOS Topical Meeting, S. 2374.

Sillero, E., O. Williams, V. Lebedev, V. Cimalla, C.-C. Röhlig, C. Nebel and F. Calle (2009).

Static and dynamic determination of the mechan- ical properties of nanocrystalline diamond micromachined structures. Journal of Micromechanics and Microengineering JMM 19, 115016 (1–7).

Sillero, E., O. Willians, V. Lebedev, V. Cimalla, C.-C. Röhlig, C. Nebel and F. Calle (2009).

Nanocrystalline diamond microelectromechanical resonators. In Proceedings of the 33rd Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDIC, Malaga, Spain, S. 10–13.

Stollberg, K., A. Brückner, J. Duparré, P. Dannberg, A. Bräuer and A. Tünnermann (2009).

The Gabor superlens as an alternative wafer- level camera approach inspired by superposition compound eyes of nocturnal insects. Optics Express 17(18), 15747–15759.

Weidenfeld, S., M. Wiesner, M. Eichfelder, M. Schulz, R. Roßbach, M. Jetter and P. Michler (2009).

Beam profile characteristics of red VCSEL with oxide-confined aperture. In Proceedings of the 13th European Workshop on Metalorganic Vapor-Phase Epitaxy, S. D.05. CD-Rom.

Wiesner, M., S. Weidenfeld, M. Eichfelder, R. Roßbach, M. Jetter and P. Michler (2009).

Red VCSEL (655 nm) for POF applications. In Proceedings 16. ITG-Fachtagung Kommunikationskabelnetze, S. 141– 144.

2008

Brückner, K., F. Niebelschütz, K. Tonisch, S. Michael, A. Dadgar, A. Krost, V. Cimalla, O. Ambacher, R. Stephan and M. Hein (2008).

Two-Dimensional Electron GaS Based Actuation of Piezoelectric Al- GaN/GaN Microelectromechanical Resonators. Applied Physics Letters 93, 173504 (1–3).

Friese, C., A. Weber, F. Krogmann, R. Shaik, W. Mönch and H. Zappe (2008).

New Technologies for Tunable Micro-optics. In MEMS, MOEMS, and Micromachining III Proceedings of SPIE, Volume 6993, S. 699306 (1–9).

Gebhardt, S., U. Partsch and A. Schönecker (2008).

PZT Thick Films for MEMS. In Proceedings of the 17th International Symposium on Application of Ferroelectrics ISAF, S. 1–2.

Gebhardt, S., A. Schönecker, C. Bruchmann, E. Beckert, G. Rodrigues, R. Bastaits and A. Preumont (2008).

Active Optical Structures by Use of PZT Thick Films. In Proceedings of the 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies CICMT, S. 000087–000093.

Jetter, M. , R. Rossbach, P. Michler (2008)

Rote VCSEL für Hochgeschwindigkeits-Datenübertragung über  POF (Red VCSELs for high-speed data communication) Photonik 1.

Krogmann,F.,W.Mönch and H.Zappe (2008).

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